1200℃ high temperature CVD (tube type) furnace:
Furnace tube diameter: 50MM, material: quartz;
Highest temperature: 1200 degrees; temperature control accuracy: 2 degrees;
Inlet: four-channel MFC (mass flow meter), flow 0-200SCCM;
Gas extraction system: rotary vane vacuum pump, ultimate vacuum: 6.7*10E-1Pa;
The material of gas path is made of precise-sanitary stainless steel;
Frame: industrial aluminum, appearance is simple;
Universal truckles: can be moved to any position;
1600 degree high temperature CVD (tube type) furnace:
Furnace tube diameter: 80MM, material: alumina ceramic (corundum tube);
Highest temperature: 1600 degrees; temperature control accuracy: 5 degrees;
Inlet: four-channel MFC (mass flow meter), flow 0-200SCCM;
Gas extraction system: rotary vane vacuum pump, ultimate vacuum: 6.7*10E-2Pa;
The material of gas path is made of precise-sanitary stainless steel;
Frame: industrial aluminum, appearance is simple;
Universal truckles: can be moved to any position;
