Device under development—Middle amount、Small amount trial production of OLED Lighting Panel
Middle amount trial production：
Features：
Large size OLED lighting panel（300mm*300mm）;
Adopt integrated system, all operations are completed through computer / touch screen;
Add interlocking function to software to avoid incorrect operation;
Full-automation control of flow of substrates and online replacement of masks;
Use linear source to evaporate organic materials, with good uniformity and high efficiency.
Main Parameters：
Chamber: 2700mm*800mm*850mm, multi-doors on single side, material：SUS304
Vacuum: Ultimate vacuum is 2.0*10-5Pa, molecular pump+oil free dry pump
Substrate: 300mm*300mm, online replacement of masks under vacuum condition
Frame: 80 series aluminum, with light weight and good appearance
Source: Organic linear source and metal point source
Thickness control: Quartz crystal thickness monitor, evaporation speed of closed automatic control 7, operation system: PLC+touch screen
Small amount trial production：
Features：
Large size OLED lighting panel (less than 100mm*100mm);
Adopt integrated system, all operations are completed through computer / touch screen
Add interlocking function to software to avoid incorrect operation;
Full-automation control of flow of substrates and replacement exchange of masks;
Multi-chamber linkage, with substrate in-and-out transition chamber, to improve efficiency of experiments
Main Parameters：
Chamber: multi-chamber combination, including transition chamber, metal、organic evaporation chamber, MASK replacement chamber, substrate in-and-out chamber, material: SUS304
Vacuum: Ultimate vacuum is 2.0*10-5Pa, molecular pump+mechanical pump
Substrate: <100mm*100mm, online replacement of masks under vacuum condition
Frame: 80 series aluminum, with light weight and good appearance
Substrate transition chamber: able to store several substrates
MASK chamber: store several organic、metal MASK
Thickness control: Quartz crystal thickness monitor, evaporation speed of closed automatic control 8, operation system: PLC+touch screen
